

ICPT 2022 is jointly hosted by the
CMP User's Group of the
Northern California Chapter of the
American Vacuum Society and
Center for Advanced Materials Processing (C.A.M.P.).
ICPT 2022 will provide an international forum for academic researchers, industrial practitioners, and engineers from around the world to exchange information on state-of-the-art research in CMP technology. ICPT 2022 promotes the exchange of opportunities, ideas, friendly relationships, and research collaboration.
ICPT 2022
International Conference on Planarization Technology
September 27-29, 2022 | Benson Hotel | Portland, Oregon, U.S.A. + Everywhere!
HYBRID EVENT:
Live In-Person or Virtual Conference Experience | REGISTER NOW!




Technical Presentations | Keynote Talks | Posters | Exhibitions | Networking




For the first time in its history, ICPT is going hybrid offering both an in-person event and a captivating virtual conference experience. Despite a two year hiatus due to the global pandemic, we are evolving and coming back stronger than ever. For those that are passionate about planarization technology, we aim to produce the biggest ICPT yet with the broadest reach. Continuing the tradition started with ICPT 2015, the last time the conference was on American soil, the #1 global planarization-focused conference and the #1 American-based planarization conference (C.A.M.P.) are joining forces to put on a very special one-of-a-kind not-to-be-missed celebration!
Learn about the newest innovations in our field of specialization. Reconnect with colleagues from around the world. Discover new opportunities for solving problems from the insight of technical experts, thought leaders, and visionaries. Reengage with customers and suppliers. Most of all, have fun! Enjoy live or on-demand recordings for up to 60 days after the event from planarization professionals operating on the forefront.
All registrants (both in-person and virtual) will have access to the Engagez virtual conference platform which made the all-virtual C.A.M.P. 2021 an incredible success. Whether you join us from a corporate viewing party, seated in the magnificent Benson's Mayfair ballroom, or from your desk (at work or home), we warmly welcome you back.
Countdown to ICPT 2022
According to Wix's benchmarking in the category of 'science research' websites, our only 5-month-old ICPT 2022 website ranks better than
-
95% of peers for number of unique visitors
-
91% of peers for average session duration
-
95% of peers for returning visitors
We believe this positively reflects on the vitality and enthusiasm of our global Planarization/CMP community.
Thank you to all of our visitors for your support!
Please keep spreading the word with colleagues, friends, and coworkers!
Check out some interesting website analytics data here:
All Videos
All Videos


Call to Innovators

Look back at ICPT 2015, before ICPT 2022

Welcome to ICPT 2022 Host City: Portland, Oregon!

Greetings, Global CMP Community
Our Keynote Speakers
FEATURED INDUSTRY EXPERTS

Fritz Redeker has worked for over 40 years in integrated circuit and equipment development, most recently at Applied Materials CMP division. A Bay Area native, he obtained his BS in Chem Engineering at UC Berkeley in 1981. He is a passionate hands-on people-oriented leader with career long product development and team creation experience in Etch, CVD, Clean, metal deposition and CMP. Fritz was part of the team that drove Applied Materials CMP into the marketplace. He is co-author of about 250 patents and 20 publications. Fritz recently retired in early 2021.
Matthew Prince (Intel Fellow, Technology Development, Director of Planarization Technology Development) is responsible for leading Intel’s chemical mechanical planarization (CMP) process development. He joined Intel in 1988 as a process engineer and has delivered planarization solutions for all of Intel’s process advancements including dual damascene Interconnects, HiK Metal Gate, 3D fin transistors, COAG, and others. Matt’s leadership started with the development of Intel’s first CMP processes (Intel’s 0.8u technology node). He has been on the cutting edge of CMP innovation for three decades, directing development of the planar industry ecosystem, from CMP equipment to consumables. He holds more than 15 patents and has contributed to multiple publications. For two decades he directed academic CMP research programs, leading to dozens of publications.

Agenda
SEPTEMBER 26, 27, 28, 29
ICPT2022 SUMMARY SCHEDULE OF EVENTS
Date | Time | Function | Room |
---|---|---|---|
9/26/22 Monday | 6:00 pm - 7:30 pm | Welcome Reception | Crystal Ballroom |
9/27/22 Tuesday | 7:00 am - 8:00 am | Breakfast | Parliament Room & Crystal Ballroom |
8:00 am - 5:00 pm | Exhibitors | London Grill (Lower Level) | |
8:00 am - 12:00 pm | ICPT Sessions A & B | Mayfair Ballroom | |
12:00 pm - 1:15 pm | Lunch | Parliament Room & Crystal Ballroom | |
1:15 pm - 4:45 pm | ICPT Sessions C & D | Mayfair Ballroom | |
4:45 pm - 6:00 pm | Poster Session 1 & Reception | Crystal Ballroom | |
9/28/22 Wednesday | 7:00 am - 8:00 am | Breakfast | Parliament Room & Crystal Ballroom |
8:00 am - 5:00 pm | Exhibitors | London Grill (Lower Level) | |
8:00 am - 12:00 pm | ICPT Session E (CAMP) | Mayfair Ballroom | |
11:40 am - 12:00 pm | Achievement Awards | Mayfair Ballroom | |
12:00 pm - 1:00pm | Lunch | Parliament Room & Crystal Ballroom | |
1:00 pm - 4:45 pm | ICPT Sessions F & G | Mayfair Ballroom | |
4:45 pm - 5:45pm | Poster Session 2 & Reception | Crystal Ballroom | |
5:45 pm - 6:15 pm | Transport to banquet | Hotel Entrance (Departs every 15 minutes) | |
6:30 pm - 9:00 pm | Dinner Cruise | Portland Spirit (Salmon Springs Dock) | |
9:00 pm - 9:30 pm | Transport back to Hotel | Bus drop-off at hotel entrance | |
9/29/22 Thursday | 7:00 am - 8:00 am | Breakfast | Parliament Room & Crystal Ballroom |
8:00 am - 11:55 am | ICPT Sessions H & I | Mayfair Ballroom | |
11:55 am - 12:15 pm | Student Awards & Closing Remarks | Mayfair Ballroom | |
12:15 pm - 1:00 pm | Lunch | Box Lunch in Crystal Ballroom | |
1:15 pm - 6:00 pm | Wine Tour | Hotel Entrance |
Career Development:
"Mentoring: Accelerate Your Career"
Tuesday at 5:30 pm in the Main Hall

Dinner Banquet River Cruise onboard the Portland Spirit
Wednesday, Sept 28
The best way to dine in Portland — on the Willamette River enhanced by dazzling city sights and lights. You'll enjoy an evening featuring river cruise, Northwest cuisine (locally sourced and prepared fresh on board), live piano music and captain's narration on the outer decks.
Note: The cost of the dinner cruise is already included in paid registration for all on-site attendees. You do not have to pay extra for this event (unless you want to bring an unregistered spouse or colleague along). (Cruise is not available for virtual attendees.)
For more information and a photo gallery
https://www.portlandspirit.com/dinner.php
Optional Wine Tour at Raptor Ridge Vineyard
Immediately after closing on Thursday, Sept 29
Explore Oregon Wine Country and learn what makes Oregon wines so special and internationally lauded. Known worldwide for delicious Pinot Noir wines, the region is also home to a vast array of other varieties including sparkling wines and crisp white varieties. Explore the 27-acre vineyard site nested in the Willamette Valley’s Chehalem Mountains AVA. Walk among the vines to tour three distinct vineyard blocks during the prime-time of harvest, and experience the wines they become with a distinct, expertly-guided vine-side tasting. Return to the tasting room where you might catch glimpses of four snow-covered Cascade peaks and enjoy a 5-wine tasting flight guided by the friendly knowledgeable tasting room team.
For more information and a photo gallery of the vineyard




The Venue
THE BENSON:
A HISTORIC DOWNTOWN PORTLAND HOTEL
Since opening this downtown Portland Hotel in 1913, The Benson has been a hidden gem. Envisioned by lumber baron and philanthropist Simon Benson, this fabled, European-style hotel was built to put Portland on the international map and to be the finest hotel west of the Mississippi. Featuring Italian marble floors, Austrian crystal chandeliers, and wood paneling from rare Circassian walnut harvested from the imperial forests of Russia, the hotel is a sublime achievement of vision and American master craftsmanship. It is a class all its own. No other hotel in the region comes close to the quintessential elegance, amenities, and charm of The Benson. For more than 100 years, the hotel’s staff has welcomed celebrities, CEOs, dignitaries, and a majority of U.S. presidents.
Now it’s your turn to discover the timeless beauty of this landmark hotel. Read more on the storied history of The Benson Hotel here.

Learn more about the interesting life of Norwegian-American, Portland lumber baron, and philanthropist Simon Benson at Wikipedia and the Oregon Encyclopedia.

In 1912, Benson gave the City of Portland $10,000 for the installation of twenty bronze drinking fountains. These fountains, known as "Benson Bubblers", are still in use in downtown Portland. Portland's sister city, Sapporo, Japan, also has one of these drinking water fountains!
