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ICPT 2022

International Conference on Planarization Technology

The International Conference on Planarization Technology (ICPT)

will be held at the Benson Hotel located in Portland, Oregon
September 27-29, 2022
In-person for 1st time in 3 years
Virtual for those unable to travel to Portland

ICPT 2022 is jointly hosted by the CMP User's Group of the
Northern California Chapter of the American Vacuum Society &
Clarkson University's Center for Advanced Materials Processing (C.A.M.P.).

ICPT 2022 will provide an international forum for academic researchers, industrial practitioners, and engineers from around the world to exchange information on state-of-the-art research in CMP technology. ICPT 2022 promotes the exchange of opportunities, ideas, friendly relationships, and research collaboration.

Countdown to ICPT2022


SEPTEMBER 26, 27, 28, 29


9/26 Monday
6:00 - 7:30
Welcome Reception
Crystal Ballroom
9/27 Tuesday
7:00 - 8:00
Parliament Room/London Grill
8:00 - 5:00
London Grill/Little London/Wine Room
8:00 - 12:00
ICPT Sessions A&B
Mayfair Ballroom
12:00 - 1:15
Parliament Room/London Grill
1:15 - 4:45pm
ICPT Sessions C&D
Mayfair Ballroom
9/28 Wednesday
7:00 - 8:00
Parliament Room/London Grill
8:00 - 5:00
London Grill/London Grill/Wine Room
8:00 - 12:00
ICPT Session E (CAMP)
Mayfair Ballroom
11:45 - 12:00
Achievement Awards
Mayfair Ballroom
12:00 - 1:00pm
Parliament Room/London Grill
1:00 - 4:45pm
ICPT Sessions F&G
Mayfair Ballroom
4:45 - 5:45pm
Poster Session2 & Reception
Crystal Ballroom
Transport to banquet
Dinner Cruise
Portland Spirit
9/29 Thursday
7:00 - 8:00
Parliament Room/London Grill
8:00 - 11:55
ICPT Sessions H&I
Mayfair Ballroom
11:55 - 12:15pm
Student Awards & Closing Remarks
Mayfair Ballroom
Depart for Wine Tour

Dinner Banquet River Cruise onboard the Portland Spirit

Wednesday, Sept 28


The best way to dine in Portland — on the Willamette River enhanced by dazzling city sights and lights. You'll enjoy an evening featuring river cruise, Northwest cuisine (locally sourced and prepared fresh on board), live piano music and captain's narration on the outer decks.

Note: The cost of the dinner cruise is already included in paid registration for all on-site attendees. You do not have to pay extra for this event (unless you want to bring an unregistered spouse or colleague along). (Cruise is not available for virtual attendees.)


For more information and a photo gallery














Optional Wine Tour at Raptor Ridge Vineyard

Immediately after closing on Thursday, Sept 29


Explore Oregon Wine Country and learn what makes Oregon wines so special and internationally lauded. Known worldwide for delicious Pinot Noir wines, the region is also home to a vast array of other varieties including sparkling wines and crisp white varieties.  Explore the 27-acre vineyard site nested in the Willamette Valley’s Chehalem Mountains AVA. Walk among the vines to tour three distinct vineyard blocks during the prime-time of harvest, and experience the wines they become with a distinct, expertly-guided vine-side tasting. Return to the tasting room where you might catch glimpses of four snow-covered Cascade peaks and enjoy a 5-wine tasting flight guided by the friendly knowledgeable tasting room team.


For more information and a photo gallery of the vineyard


RR Winery Long Logo Hi Res White transpa

Our Keynote Speakers


Fritz Redeker has worked for over 40 years in integrated circuit and equipment development, most recently at Applied Materials CMP division. A Bay Area native, he obtained his BS in Chem Engineering at UC Berkeley in 1981. He is a passionate hands-on people-oriented leader with career long product development and team creation experience in Etch, CVD, Clean, metal deposition and CMP. Fritz was part of the team that drove Applied Materials CMP into the marketplace.  He is co-author of about 250 patents and 20 publications. Fritz recently retired in early 2021.

Matthew Prince (Intel Fellow, Technology Development, Director of Planarization Technology Development) is responsible for leading Intel’s chemical mechanical planarization (CMP) process development.  He joined Intel in 1988 as a process engineer and has delivered planarization solutions for all of Intel’s process advancements including dual damascene Interconnects, HiK Metal Gate, 3D fin transistors, COAG, and others.  Matt’s leadership started with the development of Intel’s first CMP processes (Intel’s 0.8u technology node). He has been on the cutting edge of CMP innovation for three decades, directing development of the planar industry ecosystem, from CMP equipment to consumables.  He holds more than 15 patents and has contributed to multiple publications.  For two decades he directed academic CMP research programs, leading to dozens of publications. 


The Venue

The Benson Hotel

309 SW Broadway

Portland, OR 97205





  Since opening this downtown Portland Hotel in 1913, The Benson has been a hidden gem.  Envisioned by lumber baron and philanthropist Simon Benson, this fabled, European-style hotel was built to put Portland on the international map and to be the finest hotel west of the Mississippi.  Featuring Italian marble floors, Austrian crystal chandeliers, and wood paneling from rare Circassian walnut harvested from the imperial forests of Russia, the hotel is a sublime achievement of vision and American master craftsmanship.  It is a class all its own.  No other hotel in the region comes close to the quintessential elegance, amenities, and charm of The Benson. For more than 100 years, the hotel’s staff has welcomed celebrities, CEOs, dignitaries, and a majority of U.S. presidents.

Now it’s your turn to discover the timeless beauty of this landmark hotel. Read more on the storied history of The Benson Hotel here.


Learn more about the interesting life of Norwegian-American, Portland lumber baron, and philanthropist Simon Benson at Wikipedia and the Oregon Encyclopedia.


In 1912, Benson gave the City of Portland $10,000 for the installation of twenty bronze drinking fountains. These fountains, known as "Benson Bubblers", are still in use in downtown Portland.  Portland's sister city, Sapporo, Japan, also has one of these drinking water fountains!


Our Sponsors


Platinum Sponsors

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Gold Sponsors

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Silver Sponsors

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