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ICPT 2022 is jointly hosted by the

CMP User's Group of the 

Northern California Chapter of the

American Vacuum Society and 

Clarkson University's

Center for Advanced Materials Processing (C.A.M.P.).

ICPT 2022 will provide an international forum for academic researchers, industrial practitioners, and engineers from around the world to exchange information on state-of-the-art research in CMP technology. ICPT 2022 promotes the exchange of opportunities, ideas, friendly relationships, and research collaboration.

Please let us know if you need any donuts.  

ICPT 2022

International Conference on Planarization Technology

Technical Presentations | Keynote Talks | Posters | Exhibitions | Networking

The ICPT Organizing Committee would like to sincerely thank all of our in-person and virtual attendees and our sponsors for making ICPT 2022 an enormous success.  Please check out the post conference letter from Co-Chairs Rob Rhoades and Jeff McKinnis.

Paul Feeney

Bradley Wood

Mike Pevny

Bob Roberts

Jeff McKinnis

Rob Rhoades

Gene Davis

Michael Wedlake

Devon Shipp

Countdown to ICPT 2022

According to Wix's benchmarking in the category of 'science research' websites, our only 5-month-old ICPT 2022 website ranks better than

  • 95% of peers for number of unique visitors

  • 91% of peers for average session duration

  • 95% of peers for returning visitors

We believe this positively reflects on the vitality and enthusiasm of our global Planarization/CMP community.
​Thank you to all of our visitors for your support!
Please keep spreading the word with colleagues, friends, and coworkers!

Check out some interesting website analytics data here:

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Japan Temple Bell
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All Videos

All Videos

All Videos
Call to Innovators

Call to Innovators

Play Video
Look back at ICPT 2015, before ICPT 2022

Look back at ICPT 2015, before ICPT 2022

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Welcome to ICPT 2022 Host City: Portland, Oregon!

Welcome to ICPT 2022 Host City: Portland, Oregon!

Play Video
Greetings, Global CMP Community

Greetings, Global CMP Community

Play Video

Our Keynote Speakers


Fritz Redeker has worked for over 40 years in integrated circuit and equipment development, most recently at Applied Materials CMP division. A Bay Area native, he obtained his BS in Chem Engineering at UC Berkeley in 1981. He is a passionate hands-on people-oriented leader with career long product development and team creation experience in Etch, CVD, Clean, metal deposition and CMP. Fritz was part of the team that drove Applied Materials CMP into the marketplace.  He is co-author of about 250 patents and 20 publications. Fritz recently retired in early 2021.

Matthew Prince (Intel Fellow, Technology Development, Director of Planarization Technology Development) is responsible for leading Intel’s chemical mechanical planarization (CMP) process development.  He joined Intel in 1988 as a process engineer and has delivered planarization solutions for all of Intel’s process advancements including dual damascene Interconnects, HiK Metal Gate, 3D fin transistors, COAG, and others.  Matt’s leadership started with the development of Intel’s first CMP processes (Intel’s 0.8u technology node). He has been on the cutting edge of CMP innovation for three decades, directing development of the planar industry ecosystem, from CMP equipment to consumables.  He holds more than 15 patents and has contributed to multiple publications.  For two decades he directed academic CMP research programs, leading to dozens of publications. 



SEPTEMBER 26, 27, 28, 29


9/26/22 Monday
6:00 pm - 7:30 pm
Welcome Reception
Crystal Ballroom
9/27/22 Tuesday
7:00 am - 8:00 am
Parliament Room & Crystal Ballroom
8:00 am - 5:00 pm
London Grill (Lower Level)
8:00 am - 12:00 pm
ICPT Sessions A & B
Mayfair Ballroom
12:00 pm - 1:15 pm
Parliament Room & Crystal Ballroom
1:15 pm - 4:45 pm
ICPT Sessions C & D
Mayfair Ballroom
4:45 pm - 6:00 pm
Poster Session 1 & Reception
Crystal Ballroom
9/28/22 Wednesday
7:00 am - 8:00 am
Parliament Room & Crystal Ballroom
8:00 am - 5:00 pm
London Grill (Lower Level)
8:00 am - 12:00 pm
ICPT Session E (CAMP)
Mayfair Ballroom
11:40 am - 12:00 pm
Achievement Awards
Mayfair Ballroom
12:00 pm - 1:00pm
Parliament Room & Crystal Ballroom
1:00 pm - 4:45 pm
ICPT Sessions F & G
Mayfair Ballroom
4:45 pm - 5:45pm
Poster Session 2 & Reception
Crystal Ballroom
5:45 pm - 6:15 pm
Transport to banquet
Hotel Entrance (Departs every 15 minutes)
6:30 pm - 9:00 pm
Dinner Cruise
Portland Spirit (Salmon Springs Dock)
9:00 pm - 9:30 pm
Transport back to Hotel
Bus drop-off at hotel entrance
9/29/22 Thursday
7:00 am - 8:00 am
Parliament Room & Crystal Ballroom
8:00 am - 11:55 am
ICPT Sessions H & I
Mayfair Ballroom
11:55 am - 12:15 pm
Student Awards & Closing Remarks
Mayfair Ballroom
12:15 pm - 1:00 pm
Box Lunch in Crystal Ballroom
1:15 pm - 6:00 pm
Wine Tour
Hotel Entrance

Career Development:

"Mentoring: Accelerate Your Career"

Tuesday at 5:30 pm in the Main Hall

Dinner Banquet River Cruise onboard the Portland Spirit

Wednesday, Sept 28


The best way to dine in Portland — on the Willamette River enhanced by dazzling city sights and lights. You'll enjoy an evening featuring river cruise, Northwest cuisine (locally sourced and prepared fresh on board), live piano music and captain's narration on the outer decks.

Note: The cost of the dinner cruise is already included in paid registration for all on-site attendees. You do not have to pay extra for this event (unless you want to bring an unregistered spouse or colleague along). (Cruise is not available for virtual attendees.)


For more information and a photo gallery













Optional Wine Tour at Raptor Ridge Vineyard

Immediately after closing on Thursday, Sept 29


Explore Oregon Wine Country and learn what makes Oregon wines so special and internationally lauded. Known worldwide for delicious Pinot Noir wines, the region is also home to a vast array of other varieties including sparkling wines and crisp white varieties.  Explore the 27-acre vineyard site nested in the Willamette Valley’s Chehalem Mountains AVA. Walk among the vines to tour three distinct vineyard blocks during the prime-time of harvest, and experience the wines they become with a distinct, expertly-guided vine-side tasting. Return to the tasting room where you might catch glimpses of four snow-covered Cascade peaks and enjoy a 5-wine tasting flight guided by the friendly knowledgeable tasting room team.


For more information and a photo gallery of the vineyard

RR Winery Long Logo Hi Res White transpa
The Venue

The Venue

The Benson Hotel

309 SW Broadway

Portland, OR 97205




  Since opening this downtown Portland Hotel in 1913, The Benson has been a hidden gem.  Envisioned by lumber baron and philanthropist Simon Benson, this fabled, European-style hotel was built to put Portland on the international map and to be the finest hotel west of the Mississippi.  Featuring Italian marble floors, Austrian crystal chandeliers, and wood paneling from rare Circassian walnut harvested from the imperial forests of Russia, the hotel is a sublime achievement of vision and American master craftsmanship.  It is a class all its own.  No other hotel in the region comes close to the quintessential elegance, amenities, and charm of The Benson. For more than 100 years, the hotel’s staff has welcomed celebrities, CEOs, dignitaries, and a majority of U.S. presidents.

Now it’s your turn to discover the timeless beauty of this landmark hotel. Read more on the storied history of The Benson Hotel here.


Learn more about the interesting life of Norwegian-American, Portland lumber baron, and philanthropist Simon Benson at Wikipedia and the Oregon Encyclopedia.


In 1912, Benson gave the City of Portland $10,000 for the installation of twenty bronze drinking fountains. These fountains, known as "Benson Bubblers", are still in use in downtown Portland.  Portland's sister city, Sapporo, Japan, also has one of these drinking water fountains!


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